Exentec specializes in ultra-high purity chemical supply systems for the semiconductor industry. Our product portfolio includes blending and delivery equipment for many applications in aqueous chemicals and CMP slurries. In addition to our deep expertise in design and manufacturing, we also provide the required field support services, controls, integration, and technical expertise to meet stringent semiconductor process control needs.
Our integrated high-volume-manufacturing (HMV) reliable chemical systems provide precision flow, blending, distribution and advanced metrology driven control. With fully automated QC and integrated metrology operation with extensive instrumentation and control capability we maximize unit reliability, accuracies and maximize Fab up time. We integrate our systems into SCADA and FMS systems to run fully controlled processes.
Our specialties include:
- Metrology-driven closed loop process control
- Flexible, Scalable and Precise Gas & Chemical Delivery and Blending Systems
- Increased Process Control via Blend Concentration and Pressure Control
- Seamless Integration into SCADA with Full I&C Support
