Cooling Water Cabinets

Cooling Water Cabinets

Usage of Ultra-Pure-Water (UPW) in the tool circuit 
Environmental Control Chamber

Precise Environmental Chamber

Precise Environmental Chamber for controlled Process Environments.
Climate Control System

Precision Climate-Control System

The right climate ensures quality and reduces the rejection rate in production. 
Dew Point Control System

Dew Point Control Solution

System solution for the dew point control of critical humidity production 
Ultrapure Water Conditioning

Ultrapure Water Conditioning

Precise conditioning of fluid media at innovative production environments 
Cleanroom Facility
Cleanroom

Superior solutions and comprehensive services

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Mini Environments
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Air Handling Units
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Critical Subsystems and Controlled Environments
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Gas Supply
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Chemical Supply

Ultra-high purity chemical & slurry blending and distribution systems

NSI level sensor
Sensors and Ampoules
Process Exhaust
Process Exhaust